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Illustration of the trenching in the Bosch etching process [45,47].... | Download Scientific Diagram
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DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process - ScienceDirect
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3D Nanopatterning and Nanofabrication: Using Nano-Scalloping Effects in Bosch Deep Reactive Ion Etching
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Micromachines | Free Full-Text | Comparison between Bosch and STiGer Processes for Deep Silicon Etching
Bosch etch process consists of alternating etch and deposition cycles.... | Download Scientific Diagram
![a) Conventional, DRIE (Bosch) process scheme with temporal switching of... | Download Scientific Diagram a) Conventional, DRIE (Bosch) process scheme with temporal switching of... | Download Scientific Diagram](https://www.researchgate.net/publication/282974538/figure/fig1/AS:286197474709504@1445246203399/a-Conventional-DRIE-Bosch-process-scheme-with-temporal-switching-of-consecutive-etch.png)
a) Conventional, DRIE (Bosch) process scheme with temporal switching of... | Download Scientific Diagram
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